ULTRATECH STEPPER, INC.
Patent Owner
Stats
- 9 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Mar 03, 2005 most recent publication
Details
- 9 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 1,327 Total Citation Count
- Feb 27, 1981 Earliest Filing
- 34 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
5757470 Variable annular illuminator for photolithographic projection imagerAug 17, 95May 26, 98[G03B]
5452054 Variable annular illuminator for photolithographic projection imagerNov 21, 94Sep 19, 95[G03B]
5428482 Decoupled mount for optical element and stacked annuli assemblyJun 18, 93Jun 27, 95[G02B, H01S]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
5363196 Apparatus for measuring a departure from flatness or straightness of a nominally-plane mirror for a precision X-Y movable-stageExpiredJan 10, 92Nov 08, 94[G01B]
5329332 System for achieving a parallel relationship between surfaces of wafer and reticle of half-field dyson stepperExpiredDec 21, 92Jul 12, 94[G03B]
5298939 Method and apparatus for transfer of a reticle pattern onto a substrate by scanningExpiredNov 04, 91Mar 29, 94[G03B]
5266790 Focusing technique suitable for use with an unpatterned specular substrateExpiredDec 21, 92Nov 30, 93[G01J]
5166530 Illuminator for microlithographic integrated circuit manufactureExpiredDec 20, 91Nov 24, 92[H01K]
5155554 Large aperture reflective interferometer for measuring convex spherical surfacesExpiredDec 20, 90Oct 13, 92[G01B]
5094641 Apparatus and method for protecting, installing and removing mercury-vapor lampsExpiredAug 01, 90Mar 10, 92[H01K]
5070235 Accumulated exposure detection with exposure terminating attenuatorExpiredJun 18, 90Dec 03, 91[G01J]
5040882 Unit magnification optical system with improved reflective reticleExpiredMay 18, 90Aug 20, 91[G02B]
5031977 Deep ultraviolet (UV) lens for use in a photolighography systemExpiredDec 27, 89Jul 16, 91[G02B]
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